Presentation: 2025 ND EPSCoR Annual conference
October 21, 2025, NDSU Memorial Union, Fargo, North Dakota
A glance at University of North Dakota Nanofoudry Cleanroom
Rajendra
Dulal
Faculty Member
University of North Dakota
Co-authors: Mehmet Ozdogan, University of North Dakota, Department of Physics and Astrophysics , Nuri Oncel, Professor, University of North Dakota, Department of Physics and Astrophysics
Session
Poster number: 78
Ballroom
The Nanofoundry cleanroom is the shared facilities among the enthusiastic students, faculties and industry professionals which is equipped with variety of advanced instruments to support device fabrication, testing and characterization. The ISO-6 (class 1000) facility has Raith e-LINE plus electron beam lithography and Raith Picomaster 100 maskless laser lithography system to fabricate the device from micro to nano scale. Furthermore, Angstrom Evovac e-beam and thermal deposition system, Angstrom low pressure CVD, Lake Shore cryogenics probe station, PVA ion wave 10 plasma cleaner, Nikkon Eclipse LV100 optical microscope enhance the complete device fabrication, inspection and testing.